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Heaters for LTCC-Sensors Made of Resinate Pastes
Keywords: LTCC, resinate pastes, heater
Compared to conventional gas sensors, the LTCC technology allows reducing power consumption and structure dimensions. The miniaturization of ceramic microsystems, however, causes new problems to be solved. For example, the heated area of our already presented ceramic hot-plate gas sensor is only about 3.24 mm2 [1]. A further reduction of the structure dimensions requires smaller active elements like heaters. A heater meander of a typical thick-film conductive material should have a large number of squares to achieve a reasonable resistance value. It cannot be easily printed or structured on such a small substrate area. As a solution, metallo-organic (resinate) pastes can be applied. They consist of precious metal compounds (gold, platinum) that are dissolved in organic oils [2]. Besides their low film thickness after firing (about 1 m or less), -which also improves flatness of the substrate-, resinate pastes are much more highly resistive than conventional thick-films. The surface resistance for a gold ink is about 250 m/sq. It allows constructing smaller heaters with a lower number of squares. This paper addresses the application of resinate pastes, particularly for heaters applications, on LTCC ceramics. The electrical properties (resistance, TCR) of platinum and gold resinate pastes on different LTCC tapes were determined in a temperature range up to 800 C. Possible interaction between metal film and LTCC components were investigated with SEM and EDX. The heaters were made by structuring resinate pastes with a 355 nm Nd:YAG laser. The properties of such elements were investigated and discussed. References [1] Rettig F., Moos R., Ceramic meso hot-plates for gas sensors, Sensors and Actuators B, 103, 9197 (2004) [2] Fuchs H., Abt K., Metallo-Organic Preparations for Electronic Components, cfi Ber. DKG 82 (2005) Vol. 4, p. E17-E21
Jaroslaw Kita,
University of Bayreuth
Bavaria, 95440 Bayreuth,

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