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LTCC Enzymatic Microreactor
Keywords: LTCC, microreactor, enzyme
Microreactor can be a stand-alone device as well as a part of various micro-analytical system. The stand-alone microreactors are upplied in pharmaceutical industry for evaluation of influence of different chemical compounds, drugs on enzymes activity. Various technologies can be used for production of microreactors silicon, organic and LTCC (Low Temperature Cofired Ceramics). The fabrication process of LTCC microsystems is very simple and inexpensive. The integration of fluidic channels, chambers, heaters, sensors, and electronics in one LTCC package is the main profit of this technology. In this paper, an enzymatic microreactor integrated with heater and temperature sensor fabricated in LTCC technology is described. The microreactor consists of two chambers separated by threshold. The microfluidic subsystem has been designed basing on the CFD (Computational Fluid Dynamics) analysis of the micro flow. The modeling has brought better understanding of the microflow of chemically modified glass or polymeric beads through the microreactor. The modeling results are verified by the observation of the fluid movement inside the real structure via top transparent polymer layer. The vias and fluidic channels are patterned in DP951 LTCC foils by the Nd-YAG laser. The integrated heater is located inside the module. Optimized heater pattern is calculated and designed in order to assure a uniform distribution of the temperature in the area of fluidic chambers. The temperature distribution has been verified by infrared thermographic measurements. The embedded temperature sensor has been located between the heater and the fluidic channel. The sensor is made of inexpensive DP 3630 ink. The buried sensor thermoresistor reveals good electrical properties and stability in working temperature of the presented microreactor. Moreover, immobilization techniques of enzymes on glass and polymeric beads are investigated. Finally, the properties of the microreactor are compared with the properties of similar microreactor made in silicon.
Leszek Golonka, Prof.
Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Wroclaw PL 50-370,

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