Micross

Abstract Preview

Here is the abstract you requested from the CICMT_2007 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.

Processing of 0.65 Pb(Mg(1/3)Nb(2/3))O(3) - 0.35 PbTiO(3) Thick-Films on LTCC Ceramic Substrates
Keywords: PMN-PT, LTCC, screen printing
Pb(Mg1/3Nb2/3)O3 - PbTiO3 (PMN-PT) based materials exhibit high dielectric constant, high electrostrictive and piezoelectric properties and are suitable for applications in multilayer capacitors, actuators, sensors and electro-optic devices. To downsize the final device, the active material needs to be miniaturised and integrated with the substrate. 0.65 Pb(Mg1/3Nb2/3)O3 - 0.35 PbTiO3 nano-sized powder was prepared from the constituent oxide mixture with a 2 mol. % PbO excess by mechanochemical synthesis. The paste for screen-printing was prepared from the obtained powder and an organic vehicle, and printed on two types of ceramic substrates, i.e. platinised alumina and gold-coated low temperature co-fired ceramics (LTCC). Thick film structures on LTCC were sintered at 850 oC, while that ones on alumina substrates were sintered up to 950 oC. Dense, homogeneous, single phase PMN-PT thick films on alumina without any pyrochlore phase were obtained after the sintering. The obtained thick-film structures exhibit dielectric and ferroelectric properties comparable to bulk PMN-PT ceramics. Screen printed PMN-PT on gold-coated LTCC substrates intensively reacts with the components from LTCC substrate. As a result the complete formation of lead-niobium-based pyrochlore phase in active layer is observed. In order to hinder intensive chemical interactions between LTCC components and PMN-PT active layer, lead-zirconate-titanate (PZT) barrier layer was deposited between LTCC substrate and the gold electrode. The results show that after sintering at 850 oC the thick film-layer consists of single phase perovskite PMN-PT ceramic. The deposited barrier layer successfully suppresses the diffusion of PbO into LTCC and SiO2 into active layer. With using PZT barrier layer the dielectric and ferroelectric properties of PMN-PT are significantly improved compared to those of PMN-PT without barrier layer even though they are lower to that on alumina substrate. The procedure for the processing of PMN-PT on barrier-LTCC substrate needs to be optimised to improve the functional response.
Marija Kosec,
Jozef Stefan Institute
Ljubljana 1000,
Slovenia


CORPORATE PREMIER MEMBERS
  • Amkor
  • ASE
  • Canon
  • EMD Performance Materials
  • Honeywell
  • Indium
  • Kester
  • Kyocera America
  • Master Bond
  • Micro Systems Technologies
  • MRSI
  • NGK NTK
  • Palomar
  • Plexus
  • Promex
  • Qualcomm
  • Quik-Pak
  • Raytheon
  • Specialty Coating Systems