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|Interpretation of the Influence of LTCC Green Tape Characteristics on Shrinkage Behavior|
|Keywords: LTCC, Sintering, Tape Casting|
|To establish a better understanding of the complex densification and shrinkage processes of LTCC´s, and to improve the dimensional control of multilayer devices in LTCC manufacturing, a commercial LTCC system was analyzed, with special focus on the anisotropic shrinkage behavior. To investigate the influence of specific factors on the shrinkage behavior, own LTCC tapes were developed. Analyzing a commercial green tape, chemical and thermal analysis, X-ray diffraction by Rietvield method and particle size analysis were used. The results showed, that the LTCC tape was composed of alumina as a ceramic filler and of an CaO-SiO2-B2O3-Al2O3 glass. Based on these components, own LTCC systems were prepared. From the respective powder mixtures, tape casting slurries were formed using an organic solvent, binder and plasticizer, which were finally tape cast. The composition and particle size of the glass-ceramic powder were modified to change the viscosity and the crystallization kinetics of the LTCC composite. The viscous behavior of the pure glass and of the glass-filler composite in dependence on temperature were determined by means of cyclic dilatometry in a TMA device. The sintering kinetics including onset temperature and development of viscous flow as well as the phase development of the cast LTCC tapes in relation to their modified chemical composition and green sheet structures were analyzed insitu by means of optical dilatometry and HT-X-ray diffraction. The development of anistropic shrinkage will be discussed. The results allow to better understand the interrelation between the characteristics of the green tape and its densification behavior as a basic prerequisite to improve the shrinkage tolerance and to develop new LTCC systems.|
|Martin Rauscher, Student
University of Erlangen-Nuremberg, Department of Material Science, Institute of Glass and Ceramics
Erlangen, Bavaria 91058,