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Fabrication of Moving Parts within an LTCC Structure
Keywords: Embedded, Linkage, Axle
The variety and complexity of system built using LTCC has increased greatly since its introduction. Originally intended as a platform for packaging electronic components, LTCC has been used in the development of micro-sensors and micro-propulsion devices. In the interest of exploring LTCCs flexibility as a building material, the C-MEMS Lab at Boise State University has begun developing a process for including moving parts within an LTCC structure. The moving components successfully included within an LTCC structure include gears, pushrods, and fluid propelled rotors. Shafts made of mono-crystalline sapphire have also been included into the structures in conjunction with these components. These shafts have been used to locate, power, and transmit the movement of the encased parts. If successful, the design and fabrication of these novel devices will be detailed. Several pictures will be presented to illustrate the designs. Data will be presented to characterize the performance of several of the devices. The ability to embed movable features makes the design of complex systems such as compressors, turbines, and other micro-fluidic devices possible. In addition, the integration of these techniques with the electronic capabilities of LTCC provides a method to develop generators and other MEMS applications.
John Gustav Engstrom, Laboratory Technician
Boise State University
Boise, ID

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