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Ultrasonic Motors Co-sintered with Low Temperature Cofired Ceramics (LTCC) for Optical Fiber Alignment
Keywords: LTCC, Ultrasonic motor, positioning
Recent requirements for the micro motors for the popular applications such as cellular phones, digital cameras, laptop computers etc. accelerated the need for simple and compact piezoelectric ultrasonic motor development. Especially, sub-micron range motion of ultrasonic motors made it strong candidates for the precise positioning applications. The optical fiber alignment, which is currently major issue for the optoelectronics industry, is the target of this investigation. We developed compact and precise bimorph structures with delta-shaped piezoelectric ultrasonic motors by the low temperature co-fired ceramics (LTCC) technique. Based on a low temperature sinterable high power piezoelectric composition, 2-degrees of freedom ultrasonic motors were cofired with commercial LTCC green tapes as well as with silver electrode at 900oC. Original motor design was L-shaped which is consisted of two piezoelectric rectangular bars joined at 90o angle. The design of motor was modified and optimized by using ATILA FEM software (Micromechatronics Inc., PA). Displacement of the motor was enhanced by changing the angle to 80o (lambda-shaped). To obtain 2-degrees of freedom and solution for angle change problem during cofiring process, two delta-shaped motors were sandwiched which has four input electrodes. Developed bimorph structure delta-shaped motor was driven by double phases (sine and cosine voltages) for the x, y and diagonal axis movement. Fabricated motor size was below 1 cm2 and showed sub micron range motion in 2-dimensional space. This motor was integrated into LTCC substrate for an optical fiber alignment package. Details of the structure, driving circuit and performance will be discussed.
Seung-Ho Park, Graduate Student
The Pennsylvania State University
University Park, PA

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