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LTCC-Based Fluidic Components for Chemical Applications
Keywords: LTCC, 3D-structuring , fluidic components
Using LTCC for fluidic systems requires amongst other things development in two fields of research: - enhanced mechanical processing of LTCC - development of rugged fluidic connecting system to join internal and external fluidic components. Therefore one focal point in this paper is to show 3D-structuring of LTCC. In contrast to LTCC-based substrates with only electrical circuits and mostly special requirements on printing accuracy the integration of fluidic components makes great demands especially on the mechanical processing of the green tapes and the correct order of all technological steps from raw tape to the finished substrate. In this work main technologies for mechanical processing of single sheets and pre-laminated structures are laser-cutting and laser ablation. Ablation of pre-laminated structures is used to accomplish real 3D-structures without limitation from the typically layer-oriented design of LTCC-substrates. Typical structures for small reaction systems (X-type mixer, reaction channel, free-standing temperature sensor) are shown. This structures are integrated in modules with temperature control. Another focal point is the description of a connecting system for this ceramic fluidic modules. It was attached importance to a solid mechanical design, good temperature resistance of fluidic and electrical connections and a minimized dead volume. Single modules and a complete system are subject of chemical characterisation: LTCC-based mixer-structures are characterized using
T. Thelemann, Scientific Assistant
Technische Universität Ilmenau
Ilmenau 98693, Germany

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