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Nanoceramic Processing for High Power Multi-Channel Electron Multiplier in Low Temperature Cofire Ceramic (LTCC)
Keywords: Electron Multiplier, LTCC, Electrophoretic deposition
Nanoceramic processing technologies are brought together with standard LTCC materials to demonstrate a dynode structured electron multiplier with integrated cooling. Process developments include the integration of numerous components, including embedded passive, high density interconnect and high performance thermal management system. Enhanced processing capabilities include controlling sintering kinetics by particle size selection and the use of the nanoparticles. Previously, cofireable thick Ag tapes have been demonstrated that allow multilayer structures to include a thick (up to 0.5mm) solid Ag layer. The development of cavities and 3-D micro-electromechanical structures using fugitive inserts which are removed during firing have produce meso and macro scale channels, large volume cavities, micro-cavities, wick and controlled porosity structures. Micro vias of 50 um diameters and vertical channels have both been demonstrated. Nano-sized MgO, processed using electrophoresis deposition, has been developed for a secondary electron emitter (SEE). A positive temperature coefficient (PTC) resistor system has been developed to reduce supplied power to the individual multiplier structures to minimize localized heating. In a dynode structure, a discrete number of dynodes (electrode) are created to operate with the process of SEE. From an incident primary charged particle, secondary electrons are generated by cascading from one dynode to the next, with subsequent application occurring at each dynode. In this study the synthesis of nanostructure MgO is shaped by electrophoretic deposition which consists of the deposition of particles at dynodes that are submerged in a solution made of magnesium methoxide. Charged particles of MgO are suspended on the solution and forced to move towards the dynodes (which bears the opposite charge) by applying an electric field, forming a thin coating of collected MgO particles on the dynodes. Different annealing temperatures are conducted to optimize the microstructure and SEE of the deposited materials.
Feng Zheng, Graduate Student
Florida International University
Miami, FL

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