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Inclined Angle Optical Lithography Micro-Structures for Improved Micro-Mixing
Keywords: Biomedical, Lithography , Micro-Mixing
Rapid, high efficiency mixing of fluidic species at the micro-scale is essential for several microfluidic applications such as clinical diagnostics, DNA hybridization, and PCR amplification. Mixing of fluids in MEMS structures/channels on bio-chip devices is difficult due to the natural laminar flow of such fluids at the micro-scale. In this paper, we report the development of a high efficiency magnetic microfluidic mixer based on a novel 3D impellor-shaped ferromagnetic micro-stirrer bar. The 3D impellor-shaped micro-stirrer bar with 31.6 inclined angle is fabricated using titled (55) SU-8 exposure technique. The 3-D inclined micro-stirrer bar causes 3-D perturbation of fluids (Lagrangian chaos) resulting in rapid mixing in micro-scale. When compared with a vertical straight sidewall micro-stirrer bar, approximately 20% of mixing efficiency enhancement is achieved.
Dr. Donald J. Hayes , President
MicroFab Technologies, Inc.
Plano, TX

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