Device Packaging 2019

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Temperature Compensation of Calorimetric Flow Sensor using Wheatstone Bridge Circuit
Keywords: flow sensor, calorimetric, temperature compensation
The study of MEMS type flow sensor has been performed in various methods. Method for heat loss measurement using Wheatstone bridge circuit and calorimetric method is representative. Both methods need the temperature compensation as heat transfer rate shows different values for certain flow temperature. There are many temperature compensation methods suggested as a method for heat loss measurement. This paper presents the temperature compensation method for calorimetric flow sensor using Wheatstone bridge circuit, which has not been performed properly yet. The heater temperature (Th) is always set higher than fluid temperature in certain amount (dT) using temperature compensation sensor element in Wheatstone bridge circuit. Through this method, the heater produces constant heat transfer rate no matter the fluid temperature value is. If we adjust the Th using Wheatstone bridge circuit, it is easy to control the dT only controlling the values of resistors in circuit, and reduce the response time to the heater. As the fluid temperature increase, heat transfer rate goes down. Using suggested method, the heat transfer rate in heater is constant with the low error rate even though the fluid temperature is changeable.
Dongwoo Han, Student
Kyungpook National University
Daegu 702-701,
South Korea

  • Amkor
  • ASE
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