Device Packaging 2019

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Improved Electric Characterization to Compared Nitride Deposition with other Material for Passivation on Engine Oil Sensor
Keywords: passivation, engine oil sensor, degradation
The ingredient of engine oil was deteriorated that primary cause to be the oxidation in air, making progress oxidation varies with temperature, catalyst, additive and type of engine oil. The measurement degradation level was four methods. First, using the method of the volume of engine oil indicator and checking the mileage of a car. Second, converting method of electric signal by measured to viscosity or grade of dark. Third, chemical change measured method of Total Acid Number (TAN), and Total Base Number (TBN). Finally, electric characterization of engine oil to measured capacitance and conductivity change. Structure of sensor was Inter-Digit type (IDT). To protect electrode of sensor deposited nitride by PECVD. For the higher durability deposited nitride on engine oil sensor. When nothing passivation was set up drain valve in a car, electrode of sensor was defected by friction of metal particle and oxidation by included water in engine oil. Using the passivation from nitride on sensor to protected from physical friction or chemical change. This paper was presented that using the method of electric characterization change by increase in mileage of a car. Namely it was analyzed capacitance and electric conductivity appropriate to change period of engine oil.
Suwon Cho, Student
Kyungpook National University; Department of Electrical Engineering
Buk-ku, Daegu 701-010,

  • Amkor
  • ASE
  • Canon
  • Corning
  • EMD Performance Materials
  • Honeywell
  • Indium
  • Kester
  • Kyocera America
  • Master Bond
  • Micro Systems Technologies
  • MRSI
  • Palomar
  • Promex
  • Qualcomm
  • Quik-Pak
  • Raytheon
  • Specialty Coating Systems
  • Technic