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Self-Powered Microsystem with PVDF Based Microgenerator
Keywords: Microgenerator, Polymer, Piezoelectricity
Many applications today need to be totally isolated from the outside world. It is obvious that the supply energy needs to be generated inside the system. This makes a self-powered microsystem concept possible. With integration of power supply unit on the same chip there are several advantages associated. The main part builds the microgenerator based on PVDF. The polymer - silicon free technology – makes it easy to produce. The whole system is intended to be used in polymer based sensor RFID tags to power up the sensor part. There are three main units: power supply unit with an energy generator, energy storage block and signal data processing and transmission unit. An unconventional solution is to design a micro generator to convert mechanical vibrations into electrical energy with help of the piezoelectric effect. But today’s most used piezoelectric material PZT was substituted by more flexible polymer material PVDF. As storage for generated energy are polymer based supercapacitors used. The proposed electromechanical microgenerator is essentially a resonant mechanical serpentine structure based on cantilever modifications. The base PVDF layer is coated on both planar sides with a conductive metal layer. An output voltage reaches several tens of Volts. Serpentine cantilever has been designed to achieve a low resonant frequency structure as well as a low damping effect when it resonates. For simulation has been CoventorWare used. The most important aspect is the power generation efficiency to surface ratio. To minimize the microsystem area and to optimize the energy efficiency of the layout there has been designed a field of hexagonal shaped serpentine cantilever. Higher output can be achieved by building “sandwich” structure – multiple PVDF layers on each other. This unconventional low cost solution of supplying integrated MEMS with electrical energy shows great efficiency and it has been in this form not published yet.
Janicek Vladimir, Assistant Professor
FEE CTU
Prague 6, 16627,
Czech Republic


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