Here is the abstract you requested from the IMAPS_2007 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|3-D 50 Micron Microchannels in LTCC Technology|
|Keywords: LTCC, microchannels, 3-D|
|50 micron 3- D microchannels have been fabricated in LTCC. Vertical microchannels, with a density approching 10,000 channels per sq. in. , have been used to fabricate a ceramic electron multiplier with integrated lateral X-Y channels of the same dimension. The small dimensions of the 3-D microchannel open up a broad range of micro cooling and micro fluidic applications, as channels can be integrated into the same level as interconnect structures. Complex LTCC structures,using the LTCC based electron multiplier as the example, will be given.|
|Feng Zheng, Graduate Assitant
Florida International University