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3-D 50 Micron Microchannels in LTCC Technology
Keywords: LTCC, microchannels, 3-D
50 micron 3- D microchannels have been fabricated in LTCC. Vertical microchannels, with a density approching 10,000 channels per sq. in. , have been used to fabricate a ceramic electron multiplier with integrated lateral X-Y channels of the same dimension. The small dimensions of the 3-D microchannel open up a broad range of micro cooling and micro fluidic applications, as channels can be integrated into the same level as interconnect structures. Complex LTCC structures,using the LTCC based electron multiplier as the example, will be given.
Feng Zheng, Graduate Assitant
Florida International University
Miami, FL
USA


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