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|Filtering Capacitor with Bi-Zn-Nb Oxide Dielectric Embedded in a LTCC Substrate|
|Keywords: LTCC, Embedded, Capacitor|
|A new high-k dielectric (K=80) tape compatible with DuPont low-k tapes has been developed and used in order to demonstrate embedded filter capacitors in LTCC substrates. The BZN powder with the chemical composition Bi2(Zn1/3Nb2/3)2O7 was prepared at TRT using a conventional ceramic route. Ceramics thick films were prepared by tape casting using the Doctor Blade technique. Electromagnetic properties of the sintered ceramics and tapes were compared and no differences were observed. At 3.5 GHz, the permittivity was 78 with tanƒÔƒÕ = 10-3. Then, the BZN tapes were sent to Via-e for screen printing, laminating and co-sintering according to a design provided by TMI. Test vehicles including buried filtering capacitors were manufactured and evaluated. Capacitors from 4pF to 30 pF were characterised in the 300MHz ¡V 3GHz frequency range showing satisfactory properties.|
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