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|Sintering LTCC with Dissimilar Dielectric Materials|
|Keywords: LTCC, Medium k capactor, microwave sintering|
|LTCC (Low Temperature Co-fired Ceramic) technology has had limitation in co-firing dissimilar dielectric materials. Two major phenomena, different shrinkage behavior and out-diffusion from high-k material to low-k material, were examined to compose high dielectric constant capacitor. A test coupon having micro-pitch metallization was used. Two different sintering processes were applied: one is conventional furnace sintering, and the other is microwave sintering. Input power and configuration of heating elements were examined to figure out self-heat generation temperature in microwave sintering. Electrical parameters, level of out-diffusion, and mechanical properties will be discussed.|
|Yong-Bin Sun, Professor
Suwon-si, Kyeonggi-do 443-760,