Here is the abstract you requested from the MASH_2007 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|Planar Getter Systems for Maintaining the Reliability of Hermetically Sealed Devices|
|Keywords: Getters, Hermetic, Reliability|
|Hermetically sealed devices for use in severe environments are growing ever more important as advanced sensor systems and other technologies increase in use to support the Homeland Security mission. Increased usage is pushing the development of new manufacturing methods to reduce the cost and size of these devices. Ever more severe requirements for reliability of the devices are being added to these constraints. New, planarized, getter materials have been developed to meet the need to remove contaminants like water, hydrogen and organics from these devices. These new planar getters must not only meet the needs of new form factors with reduced available volume and demanding operational needs that are more severe than in traditional packages, they must meet growing economic constraints as well. This paper gives an overview of the latest getter developments to meet these needs.|
|Dr. Marco Amiotti, Scientist
SAES Getters S.p.A.
Lainate, Milan 20020,