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Expanding Use of Onsite UHP Hydrogen Production Improves Safety, Quality and Productivity in Semiconductor Operations
Keywords: gas, hydrogen, generation
Onsite gas and chemical manufacturing technologies have had a synergistic relationship with semiconductor applications - semiconductor requirements have accelerated the development of advanced onsite gas and chemical manufacturing technologies, and the semiconductor industry has provided a ready market for new onsite manufacturing technologies. Onsite technologies employed in semiconductor fab supply have included oxygen and nitrogen, various inorganic acids, hydrogen peroxide, fluorine compounds and other substances that are difficult or expensive to ship, or that are subject to contamination in the packaging or delivery process. New technologies are being introduced that allow hydrogen in various purity grades to be produced economically onsite in quantities suitable for semiconductor applications. These technologies can provide a number of advantages compared to delivering and storing hydrogen in bulk, including safety, purity, housekeeping and economy. This paper will review several of the new hydrogen generation techniques and examine their fit with the needs of the semiconductor fabrication market.
David Wolff, Region Manager
Proton Energy Systems Inc.
Wallingford , CT

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