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Development of a Silicate Based Freon Gas Sensor using a Low Power 700 o C Micro Heater in Low Temperature Cofire Ceramics
Keywords: Gas sensor, Microheater, LTCC
Ceramic silicate sensors were evaluated to detect halogen gases. These gas sensors typically operate in the range from 650oC 800oC. A low temperature cofire ceramic (LTCC) low power micro heater was developed which operates at 750oC to meet the heating requirements for these sensors. Four basic sensor materials were fabricated: Li2SiO3, Na2SiO3, K2SiO3, and CaSiO3. The evaluation of the sensor material, sensor size, operating temperature, bias voltage, electrodes size, firing temperature, gas flow, and sensor life was done. The sensor with a composition of 51.5%CaSiO3 + 48.5%Li2SiO3 demonstrated the best results, including a stable current and response to R-134A freon gas. Radiation is the dominant factor for power loss for the micro heater and radiation shields and new low thermalconductivity materials to minimize radiation and thermal conductivity losses for high temperature operation were developed. A tubular assembly with integrated cavities for radiation shielding and a very low thermally conductivity cofireable material were evaluated.
Mary Ruales, Assistant Professor
Universidad del Turabo
Miami, FL

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