Micross

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Polymeric Microelectromechanical Millimeter-Wave Systems
Keywords: polymeric , millimeter-wave systems, molding
We have been developing polymeric millimeter-wave systems based on mechanical molding and electrochemical plating processes to make W-band components, including waveguides, iris filters, waveguide-fed horn antenna and 22 feeding networks. This new class of polymeric millimeter-wave systems shows comparable performances as compared with expensive metallic counterparts widely in current millimeter-wave systems. Rectangular waveguides and waveguide-based components have been commonly employed in millimeter-wave systems for their low loss as compared to microstrip-based structures. Previously, researchers have applied MEMS (Microelectromechanical Systems) technologies to construct millimeter-wave components [1, 2]. We present several distinctive achievements in this work: (1) millimeter-wave components based on batch fabrication of polymeric substrates, (2) metallic coating and sealing by selective electroplating and bonding, and (3) system integration via a one-shot molding process [3-6]. As a result, we believe this new technology could provide low-cost manufacturing toward the integration of electromagnetic-wave systems, such as antennas, transmission lines, filters and phase-shifters.
Yiin-Kuen Fuh, Student
University of California, Berkeley
Berkeley, CA
USA


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