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|Highly Enhanced Dielectric Properties of Metal-Dielectric Nanocomposites Prepared by Aerosol Deposition Method|
|Keywords: aerosol deposition, nanocomposite, capacitor|
|Nanocomposites consisting of nanosized metal particles of gold, silver, platinum or copper embedded in a dielectric matrix have recently been the subject of many studies. Nanocomposite metal-dielectric systems have been considered for their interesting color effects in decorative applications, their adjustable electrical characteristics, their enhanced dielectric properties in RF applications, and their optical plasmonic properties in photonic applications. Nanocomposite films have been prepared using various fabrication method including sputtering, sol-gel, colloidal solutions, ion implantation, chemical vapor deposition and other methods. The conventional methods are difficult to control the size and shape of the metal particles in the host matrix. In this report, we prepare metal-dielectric nanocomposite thick films by aerosol deposition method (ADM) and report their enhanced dielectric and optical properties. Composite metal/ceramic powders are prepared from submicron particles of ceramics (PZT, BTO or BSTO) and nanometal (10-50 nm, Au, Ag, or Pt) with concentrations below 5 wt%. For example, Au/PZT nanocomposite 3-ƒÊm-thick films showed 3 times larger enhanced dieelctric properties (dielectric constant of more than 3000) than that of the monolithic PZT films. As a novel method for preparing nanocomposite, ADM can further use various nano-sized metal particles and physically make good distribution of nano-metal particles in dielectric matrix. They strongly indicate that ADM has enough possibilities of preparing new nanocomposite systems with wide range of practical applications.|
|Jae-Hyuk Park, Research Scientist
National Institute of Advanced Industrial Science and Technology (AIST)
Tsukuba, Ibaraki 305-8564,