Micross

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Micro-Patterning of Green Tape Ceramic using Powderblasting for LTCC Packaging
Keywords: powderblasting , patterning, mask
In this article, we report the use of powder blasting as a new patterning technology of green tape ceramics used in LTCC (Low Temperature Co-fired Ceramic) manufacturing. Powder blasting is based on the casting of alumina particles ejected at high velocity from a nozzle onto the substrate, through a patterned mask. Unlike laser-based processing, this technique allows precise and clean cuts due to the absence of Heat Affected Zones (HAZ). It also offers more flexibility for the fabrication of complex geometrical structures. The capital equipment and running costs incurred by this technology are substantially less than conventional methods such as laser ablation and punching. Using a Design of Experiments, we have investigated the influence of different critical process parameters on the quality of patterning onto green tape ceramic substrates. Furthermore, we have studied the properties of ductile (metal) masks and their effect on the resulting patterns. As a result of these investigations, we demonstrate the feasibility of patterning sub-100?m diameters vias, channels and cavities using this technique.
Yves Lacrotte, Engineering Doctorate
Heriot-Watt University
Edinburgh, Scotland EH14 4AS,
United Kingdom


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