Micross

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Inkjet Printing of Post-Fired Thick-Film Capacitors
Keywords: inkjet, high-k materials, capacitor
Inkjet printing is the emerging technology for the deposition of a variety of particles. As printing of nano-silver inks becomes more reliable, the use of inkjet printing for digital fabrication of microelectronic circuits gains in importance. Capacitors are frequently required in electronic circuits. With the development of new high-k (high dielectric constant) compositions the integration of capacitors promises new applications. To compete with thick-film screen printing as production method it is consequential to investigate the inkjet printing of capacitors. In a first step different organic solvents and commercial dispersants are characterised towards compatibility with the high-k compositions to reach stabilized inks that are printable with a commercial ink-jet print head. The stability of the ink is fundamental for reliable drop formation. Further on, the viscosity must fit to the print heads’ operational ranges and the inks’ interaction with the substrate has to be taken into account. In a second step the fundamental construction methods of ink-jet capacitors on fired ceramic are investigated. First, variations in solvent and particle load change the behaviour on the substrate or subsurface. Secondly the shape of the printed structures can be influenced by temperature and printing pattern. Depending on the geometrical layout several drying and firing steps are necessary which make the production more complex. Finally, different particle compositions and the thickness of the dielectric layer lead to different electrical behaviour. In the final analysis capacitors are printed with chosen high-k inks on fired ceramic substrates by inkjet printing using the obtained technical experience. After drying and sintering the shape and electric properties of the functional electrical structures are analysed.
Marcel Wassmer,
Helmuth Schmidt University
Hamburg 22043,
Germany


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