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Packaging of a MEMS Optical Switch During Developmental Testing
Keywords: LTCC, MEMS, package
Research MEMS have frequently been prototyped for operation under a probe station. In the real world they cannot be fully tested until they are packaged, especially when they are coupled to external structures that are anchored in packages. Successful insertion into applications requires that packaging be integral to the development effort. Frequently there is a short-term need for observation of the performance of such devices as-packaged. LTCC offers great flexibility to designs and performance advantages. We describe the design considerations for an LTCC package designed for functional testing of an optical-fiber-based MEMS optical switch undergoing shock and vibration environmental testing. The performance of the package was extensively modeled before the test to ensure that it would survive and it would adequately protect the MEMS device within. While the test package is non-hermetic, the eventual device package will have to be hermetic and will also have to eliminate or be judicious in its use of organic adhesives in order to ensure the proper internal environment is maintained, so we describe our planned approach to solving the long-term packaging issues as well.
Thomas P. Swiler, Senior Member of the Technical Staff
Sandia National Laboratories
Albuquerque, NM


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