Here is the abstract you requested from the DPC_2009_Mems technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|Compliant Constant Force Microgripper for Microassembly and Micromanipulation|
|Keywords: Microgripper, PET etching, Compliant constant force mechanism|
|The characterization process of micro- and submicrometer particles in some cases demands their careful handling and precise placement. In most cases, a well designed microgripper can address these requirements. Following research is focused on the process of design, finite element analysis and microfabrication of an innovative compliant constant force microgripper. This new architecture of microgripper enables it to apply a constant force to the handled micro components during micro-assembly process. This characteristic makes it outstanding comparing to the previous works in literature. The adopted fabrication process for the purpose of prototyping is a UV-assisted vertical etching and Polyethylene Terephthalate (PET) has been used as substrate. This process is a well established process to address requirements of high resolution and high-aspect-ratio in microfabrication of plastic structures. The prototyped sample has been successfully tested and its performance during micro-assembly process has been verified.|
|Mohammad Sadegh Hajhashemi, Student
Amirkabir University of Technology