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Design of Multiwall Carbon Nanotube Based Embedded Inductors
Keywords: caron nanotubes, embedded inductors, ceramic
Carbon nanotubes enable us to replace conventional metal to achieve high-value inductors and high quality factors. The values of inductance and quality factors are critical to high-quality RF product design. Current spiral inductors are widely used in many RF circuits in cell phones and wireless routers. It is desirable to achieve low power, low phase noise, and wide bandwidth wireless systems with high Q inductors. The proliferation of wireless products in the market has created a strong demand for low cost, low power and high volume implementation of RF circuits in RF products for automotive, computer, aerospace, military, and consumer electronics. This trend has led to ever-stronger demand for smaller-footprint embedded inductors suitable for System-in-Package, System-on-Package, Package-on-Package and wafer scale package applications. This paper provides design and simulation results for multiwall carbon nanotube (MWCNT) based embedded inductors on ceramic substrates. Our results show quality factors for the MWCNT-based inductor on ceramic substrates at 5 GHz exceeded 1,000. We found that our self-resonant frequency of the inductor on a ceramic substrate was approximately 60 Tera Hertz. This indicates that the MWCNT-based inductors have extremely high bandwidth. Our simulation results indicate that high quality factors and inductance values can be achieved using carbon nanotubes. Fabrication of CNT inductors was demonstrated by using E-beam lithography for 125nm segments. This work is highly promising for today’s high-performance RF circuits and high-density packaging applications. Therefore, multiwall carbon nanotubes-based inductors are the alternative to today’s small-footprint inductor. MOVED FROM EMBEDDED & INTEGRATED PASSIVES TO EMERGING TECHNOLOGIES 5-4-09.
Bruce C. Kim, Associate Professor
University of Alabama
Tuscaloosa, AL

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