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Advanced Getter Materials for GaAs, RF/MW, MEMs and Other Microelectronic Packages
Keywords: getters, moisture, hydrogen
Various getter materials have been developed over the years to deal with hydrogen and moisture caused problems in microelectronic packages. These materials have ranged from adaptations of classical metal getter systems, to the currently prevalent PdO/desiccant mixtures in silicone RTVs, to esoteric metal thin film structures. All of these approaches have been successful when used appropriately, but all of them have also presented implementation difficulties to the packaging engineer. In addition, other issues can arise during a package’s service life. A brief overview of these traditional materials and the design concerns they raise will be presented. To meet community driven needs and concerns in regards to the primary family of getters used in microelectronic packages, i.e. the silicone RTV mixtures with PdO and desiccants, a new class of getter materials have been developed as a drop in functional replacement for them. Key design goals for these materials included to increasing the capacities for hydrogen and water, while minimizing outgassed VOCs, which is of particular importance to optical applications, while eliminating corrosion inducing ionics and lowering the attainable vapor pressures for moisture inside the package. In addition, the material system allows the incorporation of RF absorbers.
Richard C. Kullberg,
Vacuum Energy Inc.
Shaker Heights, OH

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