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High-Dielectric Constant PLZT Films on Metal Foils for Embedded Passives
Keywords: ceramic film capacitor, embedded passives, reliability analysis
Ceramic film capacitors with high dielectric constant and high breakdown strength would result in advanced power electronic devices with higher performance, improved reliability, and enhanced volumetric and gravimetric efficiencies. We have grown ferroelectric films of lead lanthanum zirconate titanate (PLZT) on base metal foils by chemical solution deposition. Their dielectric properties were characterized over the temperature range between -50 and 150C. At room temperature, we measured a dielectric constant of ≈1300, loss factor of ≈0.05, leakage current density of ≈7 nA/cm2, breakdown strength >2 MV/cm, and energy density >85 J/cm3. A series of highly accelerated lifetime tests (HALT) was performed to determine the reliability of these PLZT film-on-foil capacitors under high temperature and high field stress conditions. Samples were exposed to temperatures ranging from 100 to 150C and electric fields ranging from 870 KV/cm to 1.3 MV/cm during the HALT testing. Breakdown behavior of the samples was evaluated by Weibull analysis. The mean time to failure was projected to be >3000 hr at 100C with a dc electric field of ≈260 KV/cm. Details of processing conditions, dielectric properties, and reliability analysis will be presented. Work was supported by the U.S. Department of Energy, Office of Vehicle Technologies Program, under Contract DE-AC02-06CH11357.
Beihai Ma, Materials Scientist
Argonne National Laboratory; Energy Systems Division
Lemont, IL
USA


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