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|Understanding Semiconductor Package Hermeticity|
|Keywords: Hermeticity, Leak rates, Helium leak detection|
|To prevent moisture ingress in hermetically sealed packages, allowable leak rates have been substantially reduced in some Mil-Std procedures to the point where secondary measurement effects have become dominant and must be characterized. Helium diffusion into glass seals, feedthroughs, and windows can bias Helium leak rate measurements and cause good parts to be rejected. Similarly, moisture plugging of real leak paths can skew Nitrogen and Krypton measurements, and as a result, accept parts which have a potential moisture ingress problem. Using a Cumulative Helium Leak Detector (CHLD), the relative magnitude of secondary measurement effects have been mitigated for medical, hybrid and discrete semiconductor packages. What potential impact will this new technology have on assessing product and system reliability potential?|
|John C. Pernicka, President/Chief Scientist
Fort Collins, CO