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Optical Leak Test Data per Latest Release of MIL-STD 750, Test Method 1071
Keywords: Optical Leak Test (OLT), Hermeticity, Mil Std 750 TM 1071
The Optical Leak Test (OLT) is a proven hermeticity test method that relies on a precise measurement of individual package lid deflection to infer a pressure change inside the package, and compute a corresponding helium leak rate. An improved OLT fine and gross leak method was written into Mil-Std-883 TM 1014 in 2004 and has worked well for the hybrid and optoelectronics community. Mil-Std-750 is the TM 1014 equivalent for small volume transistor and diode packages. In Nov 2006 Mil-Std-750 TM 1071.8 was revised and the hermeticity requirement was tightened up to two orders of magnitude for the larger package volume (.5 cc and above) and to a lesser extent for package volumes below .5 cc. This paper presents measured test data comparing the OLT method to other hermeticity test techniques including conventional gross and fine helium based methods, Cumulative Helium Leak Detection (CHLD), and the Kr- 85 radioisotope based method for various package styles and volumes. Review of the test data shows OLT has both the precision and repeatability to make reliable hermeticity measurements below the TM 1071 specification levels for both the current and proposed method. In addition to the test data, the lessons learned and problems associated with correlation studies comparing fine leak methods will be discussed.
Dick Vanderneut,
NorCom Systems Inc.
Norristown, PA

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