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Process Evaluation of DuPont 9k7 LTCC
Keywords: LTCC, 9k7, process
DuPont 9K7 low temperature cofired ceramic (LTCC) is a low loss glass ceramic dielectric tape targeting high frequency applications. The low loss is mainly achieved via glass-derived and glass-reacted crystallizations which occur during the sintering stage to minimize the amount of residual glass. The presentation will report the impact of one critical process parameter, the ramp rate from binder burnout (550 °C) to sintering temperature (850 °C), on dielectric only 9K7 properties. The results are explained by competing mechanisms between densification and crystallization in 9K7 sintering. Microstructure evidence is also provided to support the conclusions. Influence of processing conditions on Au conductors is also addressed. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000.
Steve Dai,
Sandia National Laboratories
Albuquerque, NM
USA


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