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Novel Technology Options for Multilayer-Based Ceramic Microsystems
Keywords: 3-D structures in LTCC/ HTCC, ultra fine line functional layer, combined laser- and micropunching processing
Ceramic multilayer technologies as LTCC (=Low Temperature Cofired Ceramics) or HTCC (=High Temperature Cofired Ceramics) are applied in a wide range for the fabrication of highly integrated ceramic microelectronic packages. Furthermore ceramic multilayer technologies offer the possibility for the additional integration of 3-D-structures. These 3-D-structures can be applied e.g. for the transport of fluid or gaseous substances (applications: micro fuel cells, micro reactors) or the integration of sensors (physical, electrochemical). The materials characteristics of the ceramics allows high reliability applications of multilayer-based Microsystems in harsh environment like e.g. at elevated temperatures, with thermal and mechanical shock or in contact with aggressive chemicals. For this reason multilayer applications in automotive, aerospace, medical engineering and biochemistry are common. The integration of the heterogeneous functionality (3-D-structures: channels, diaphragms, cavities, nozzles, springs; integrated functional layers: R, L, C, sensors) requires beside the co-fire compatibility of the included materials a technological toolkit consisting of suited high speed micro structuring technologies and additional 3-D-printing technologies (e.g. aerosol printing) for the deposition of functional layers. In the paper presents technology options of a new combined machine for tape/ multilayer structuring consisting of micro punching tools and micro UV-laser ablation/ cutting. Furthermore the design and development of different multilayer based components are discussed (e.g. micro fuel cell PEM fuel cell system, multilayer based micro reformer for PEM fuel cells). The usability of the Aerosol printing technology is showed for rapid prototyping for LTCC multilayer and 3-D-deposition of functional layers on LTCC. Advantages and limits of the technology are discussed.
Uwe Partsch,
Fraunhofer Institute Ceramic Technologies and Systems
Dresden, Saxony D-01277,

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