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Zinc Oxide Modeling to Create Semiconductor Dendrites by Using Micro Stereolithography
Keywords: Micro Stereolithography, Zinc Oxide, Semiconductor Dendrite
Zinc oxide ceramics exhibit various semiconductor properties through optimized elements or materials doping. The elements doping of aluminum or gallium can control the electric conductivity, and composites doping of indium and rare earth such as yttrium can increase the thermoelectric conversion efficiency. In this investigation, dendritic lattice structures of the zinc oxide semiconductors with periodically ordered arrangements or self similar patterns were fabricated successfully to increase the surfaces area and porosity values by using micro patterning stereolithography of a computer aided design and manufacturing. These semiconductor dendrites with penetrable paths and extensive interfaces will be used for fluid and heat flow receptors and applied to the novel sensor devices and energy generators. The dendritic lattice models sliced into a series of cross sectional patterns with uniform thickness by using a stereolithographic file format convertor. These numerical data were transferred into the micro processing equipment. High viscosity slurry material was prepared through the mixing of photo sensitive acrylic resin and the zinc oxide particle at 33 % in volume fraction. The slurry was supplied on a flat substrate with 5 μm in layer thickness by using a mechanical knife edge. The cross sectional image was exposed on the slurry surface by using digital micro mirror devices. Through the layer by layer processes, the solid component was obtained with micrometer order part accuracies. The dense ceramic sample was purchase after de-waxing and sintering process. The aspect ratios and coordination numbers of zinc oxide lattices were controlled and optimized through the fluid and heat flows visualization and simulations of finite difference time domain methods.
Satoko Tasaki,
Osaka University
Ibaraki, Osaka 567-0047,

  • Amkor
  • ASE
  • Canon
  • EMD Performance Materials
  • Honeywell
  • Indium
  • Kester
  • Kyocera America
  • Master Bond
  • Micro Systems Technologies
  • MRSI
  • Palomar
  • Plexus
  • Promex
  • Qualcomm
  • Quik-Pak
  • Raytheon
  • Specialty Coating Systems