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Measurement of Nitrogen Monoxide Levels in Gas Flows with a Micro Total Analytical System Based on LTCC
Keywords: NO measurement, micro total analytical system, design and manufacture
The measurement of nitrogen monoxide (NO) concentration levels is a vital aspect of environmental analysis and process monitoring. The chemiluminescent reaction with ozone in the gas phase is a well-established procedure and a variety of commercial solutions exist on the market today, but due to the complex design of these devices their application is mostly limited to the laboratory. With the presented approach a so called micro total analytical system (µTAS) is designed in ceramic, in order to open up new application fields. Low temperature co-fired ceramic (LTCC) has proven to be the ideal technology, since it offers high chemical and thermal stability as well as high degree of freedom of design. The core of the integrated device is a microfluidic system which consists of three components: an ozone generator, a reaction chamber and an element for exhaust gas treatment. The ozone generator is a micro plasma device in which the ozone is produced by the dielectric barrier discharge (DBD) mechanism. From the generator the ozone is brought into contact with the analyte containing NO inside the reaction chamber, where the chemiluminescent reaction occurs. A sealed glass window is mounted on top of the reaction chamber so that the emitted radiation can be detected and analyzed. The gas mixture leaving the reaction chamber still carries hazardous amounts of ozone and needs to be treated before it can be exhausted. In order to ensure a high life-time catalytical decomposition of ozone is realized with a non-degrading catalyst. The arcticle gives an overview of the design process with emphasis on manufacturing of the microfluidic components and technological challenges regarding life-time.
Thomas Geiling,
Ilmenau University of Technology
Ilmenau, Thuringia 98693,

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