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Design and Packaging of Ultra-High Q-Factor MEMS for Inertial Applications
Keywords: gyroscope, accelerometer, Q-factor
This paper discusses challenges, opportunities, and progress in design and packaging of ultra-high quality factor vibratory MEMS. Stand-alone, vacuum packaged single and dual axis silicon MEMS resonators with measured quality factors on the order of 1 million are reported. Unprecedentedly low energy dissipation in these microstructures is enabled by dynamically balanced design, high aspect ratio SOI fabrication, and vacuum packaging with getters. These MEMS transducers allow implementation of very sensitive vibratory rate gyroscopes. The same ultra-high quality factor transducers are also shown suitable for realization of several new classes of inertial MEMS, including angle measuring gyroscopes and resonant accelerometers.
A. A. Trusov,
University of California, Irvine
Irvine, CA
USA


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