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Ultra High Temperature Sensor RFIDS
Keywords: MEMS, Sensor, RFID
Fire detection and alarm systems are crucial safeguards for oil&gas, aerospace, marine and civil structures. Distributed temperature sensor units are in high demand for ubiquitous environment monitoring. In case of a large-scale fire event, sensors withstanding temperature up to 1000 C can provide fire-fighting teams with strategic localized temperature information to best combat the flames. Currently, wired thermistors and fiber optical sensor nodes require pre-installation and are hard to scale up. Solid-state wireless temperature sensor nodes are gaining popularity but have limited operation time due to power consumption and cannot sustain in high temperature environment. This application is calling for a wireless, low to zero power, and fire-proof solution. With the novel Laminate MEMS technology, we have developed a completely passive sensor platform that combines MEMS temperature sensing switches with reconfigurable RF components such as capacitors, inductors and antennae. The system is built on a high temperature Al2O3 substrate which carries no active silicon chips. Instead, the on-board silicon/metal bimorph switch array tunes the RF antenna and its matching circuit to achieve real-time temperature threshold sensing when charged and interrogated by an external RF reader. For identification, a series of ceramic-based capacitors and inductors are utilized to create RF spectral signatures for multi-bit addressing. This is the first wireless and passive solution of its kind for extreme high temperature environments.
Yang Zhang,
University of California - Irvine; Integrated Nanosystems Research Facility
Irvine, CA
USA


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