Abstract Preview

Here is the abstract you requested from the DPC_2011 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.

Ultra High Temperature Sensor RFIDS
Keywords: MEMS, Sensor, RFID
Fire detection and alarm systems are crucial safeguards for oil&gas, aerospace, marine and civil structures. Distributed temperature sensor units are in high demand for ubiquitous environment monitoring. In case of a large-scale fire event, sensors withstanding temperature up to 1000 C can provide fire-fighting teams with strategic localized temperature information to best combat the flames. Currently, wired thermistors and fiber optical sensor nodes require pre-installation and are hard to scale up. Solid-state wireless temperature sensor nodes are gaining popularity but have limited operation time due to power consumption and cannot sustain in high temperature environment. This application is calling for a wireless, low to zero power, and fire-proof solution. With the novel Laminate MEMS technology, we have developed a completely passive sensor platform that combines MEMS temperature sensing switches with reconfigurable RF components such as capacitors, inductors and antennae. The system is built on a high temperature Al2O3 substrate which carries no active silicon chips. Instead, the on-board silicon/metal bimorph switch array tunes the RF antenna and its matching circuit to achieve real-time temperature threshold sensing when charged and interrogated by an external RF reader. For identification, a series of ceramic-based capacitors and inductors are utilized to create RF spectral signatures for multi-bit addressing. This is the first wireless and passive solution of its kind for extreme high temperature environments.
Yang Zhang,
University of California - Irvine; Integrated Nanosystems Research Facility
Irvine, CA

  • Amkor
  • ASE
  • Canon
  • EMD Performance Materials
  • Honeywell
  • Indium
  • Kester
  • Kyocera America
  • Master Bond
  • Micro Systems Technologies
  • MRSI
  • Palomar
  • Plexus
  • Promex
  • Qualcomm
  • Quik-Pak
  • Raytheon
  • Specialty Coating Systems