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Embedded Capacitors on Silicon Interposers Enable Higher Frequency Applications
Keywords: Interposer, Capacitor, High Frequency
Silicon interposers are being used in 3d stacked assembly applications for an increasing variety of reasons, such as, reduced costs. The inclusion of an interposer opens up the option of fabricating capacitors closer to the devices they need to protect. This paper will present the results of tests and developments ALLVIA has completed on planar and trench capacitors on interposers. Test results up to 6 GHz will be detailed along with reliability results.
Dr. Sergey Savastiouk, President
Sunnyvale, CA

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