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|Surface Properties of Laser-Etched LTCC Ceramic|
|Keywords: ltcc, laser ablation, EDS|
|In the LTCC process, metal layers are usually deposited by screen printing conductor material on unfired tape substrate. Despite being widely used, this method has certain disadvantages, such as limited resolution of the printing process. An alternative method of producing conductor patterns is to deposit a uniform conductor paste layer on the substrate and the use a Nd:YAG laser to selectively ablate the conductor material, producing a desired pattern. This method allows achieving a higher patterning precision and also eliminates photochemical process of screen preparation, which makes it an attractive choice for rapid prototyping applications. Laser ablation step can be performed either post-firing (for a top conductor layer) or pre-firing (which allows for patterning buried layers). The aim of this paper is to investigate surface properties of LTCC ceramics processed by laser etching. Precision optical imaging and SEM are used to determine etched surface properties, and EDS analysis is used to determine its chemical composition. Effectiveness of conductor removal is investigated by comparing surface resistivity and metal content in raw and etched samples.|
Institute of Electron Technology
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