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Expanding Use of Onsite UHP Hydrogen Production Improves Safety, Quality and Productivity in Forming and Carrier Gas Applications
Keywords: hydrogen, forming gas, generation
This paper will review the characteristics of Proton Exchange Membrane water electrolysis and its use in on-site hydrogen manufacturing for forming and carrier semiconductor grade gas supply. Proton Exchange Membrane water electrolysis is presently in use at 50+ compound semiconductor and related facilities worldwide, and provides: • Ultra-pure gas for best process results • Sufficient pressure for all reactor inlet purification methods • Much lower pressure than stored hydrogen methods, to eliminate self-ignition hazard • True zero-inventory design – hydrogen is produced as it is used by the process • Production flow rate data back to production control systems • No need to risk introducing oxygen into piping during storage system change-out • The ability to optionally omit inlet gas purification – the hydrogen is so pure that significant cost can be avoided by eliminating inlet gas filtration This paper will review several of the installations and provide guidance on the cost, applicability, benefits and limitation of onsite supply of hydrogen by PEM water electrolysis hydrogen generation.
David E. Wolff, Region Manager
Proton Energy Systems
South Windsor, CT

  • Amkor
  • ASE
  • Canon
  • Corning
  • EMD Performance Materials
  • Honeywell
  • Indium
  • Kester
  • Kyocera America
  • Master Bond
  • Micro Systems Technologies
  • MRSI
  • Palomar
  • Promex
  • Qualcomm
  • Quik-Pak
  • Raytheon
  • Specialty Coating Systems
  • Technic