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Silicon Wafer Thinning to Reveal Cu TSV
Keywords: TSV reveal, wafer thinning, silicon etching
3D Integration is becoming a reality in device manufacturing. The TSV Middle process is becoming the dominant integration scenario. For this process flow the silicon wafer needs to be thinned to reveal the Cu TSV. Grinding is used to remove the bulk of the silicon wafer. Currently a multistep sequence of processes that includes CMP and plasma have been used to complete the final thinning of the silicon. This paper will describe a simple, cost effective method to wet etch the remaining silicon to reveal the Cu TSVs. KOH is selected as the etchant since it will not attack the TSV materials and has a higher etch rate than TMAH. The development of processes with optimum etch rates and uniformity for silicon etching along with no attack of the Cu via or oxide liner and effective post cleaning to remove residual Potassium will be presented.
Laura Mauer, Director of Process Technology
Solid State Equipment LLC
Horsham, PA

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