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Studies and Applications of Advanced Laser Scribing for HB-LEDs
Keywords: Laser scribing, High Brightness LED, Light Output
The optical and electrical properties of LEDs scribed using both traditional and advanced laser scribing were investigated. Variations in scribe line texture and depth were examined and monitored for both laser types using both optical and electron microscopy. Simulation was conducted and verified by the experimental results on laser scribing depth versus LED light output. The metrology techniques also correlated the sidewall roughness with light output of LED between traditional and advanced laser scribing. Improvements by the advanced laser scribing were demonstrated for different LED designs, such as DBR with metal mirrors. Our study showed that the advanced laser scribing is comparable to the sidewall etching process which is the current industrial standard. Our advanced laser scribing system can process different types of metal mirrors on top of DBR structures in a single tool solution. We also presented our latest results on the emerging new substrates of vertical LEDs on Si and other advanced non-sapphire substrates.
Irving Chyr, Applications Research Scientist
Electro Scientific Industries, Inc.
Fremont, CA
USA


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