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Simulation of the MEMS Vibratory Gyroscope Through Simulink
Keywords: MEMS vibratory gyroscope, Harsh Environments, Simulink
Microelectromechanical systems (MEMS) vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products after accelerometers. With advances in fabrication technologies, the low-cost MEMS gyroscope has opened up a wide variety of applications with environmental conditions ranging from mild to harsh. Specific applications in harsh environments have demanded robust MEMS gyroscopes that require extensive lab testing to assess performance. The objective of this paper is to develop an efficient and faster approach to simulate the behavior of the MEMS vibratory gyroscope. Simulink is a toolbox in MATLAB for modeling, simulating and analyzing multi-domain dynamic systems. The MEMS vibratory gyroscope is a two degree-of-freedom spring-mass-damper system. With known values of mass, spring stiffness and damping coefficient in the drive and sense direction, the characteristic equations of motion of the MEMS vibratory gyroscope can be easily solved by the Simulink model developed in this paper. This Simulink model can also be used to simulate the temperature dependent characteristics of a MEMS vibratory gyroscope.
Chandradip Patel, Graduate Student
University of Maryland
Hyattsville, MD

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