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MEMS Based Transducer Designs for Monitoring High Speed Impacts
Keywords: MEMS, high-speed transducers, , mechanical impact sensors
MEMS based technologies provide a unique opportunity to develop micro-machined mechanical transducers for a variety of sensing applications. The micro-machining techniques that have been widely used for MEMS sensors provide a viable path for developing miniature sensors required for monitoring stress and strain for high speed impacts. Moreover, this technology allows sensors to be tailored to respond to specific vibrational modes and mode types. In particular, the electro-mechnical properties must be able to support very short response times without compromising signal strength. In this paper, we present the design and fabrication of micro-miniature PNZT based transducers for short duration mechanical impacts. Comparisons of their performance with conventional PZT transducers are presented. A discussion is also given of key performance parameters and the effects of post-fabrication processing and packaging on transducer performance.
Philip Reiner, Chief Scientist
CGI Federal Inc.
Huntsville, AL

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