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Ultra High 3D Capacitors Values with High Volume Efficiency and Outstanding Stability
Keywords: 3D High Density Capacitor , Silicon Capacitors, Passive Integration
IPDIA's primary effort is to develop innovative 3D technologies to integrate Passive Devices .One of their key technology drivers is the trench high-density capacitor. After introducing the 250nF/mm2 in mass production, it's now the turn to launch outstanding performances with a new worldwide record of 550nF/mm². With the advanced packaging solutions using very thin dies stacking ,combining a high level of capacitance integration and high volumetric efficiency, this achievement will enable to extend the range of high reliability Silicon Capacitor values up to 10µF in a package size 3.4mm*2.4mm*1.4mm and even smaller . This paper will provide the details to prove that the former ambitious target of 2µF/mm3 is now close to reality.
Catherine Bunel, R&D Director

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