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Characterization of Silicate Sensors on Low Temperature Cofire Ceramic (LTCC) Substrates Using DSC and XRD techniques
Keywords: LTCC, Silicate , Gas Sensors
Characterization of Silicate sensors using Differential Scanning Calorimeter (DSC), X-ray Diffraction (XRD) and Scaning Electron microscopy (SEM) is presented. These silicate sensors are based on four primary materials: Li2SiO3, Na2SiO3, K2SiO3, and CaSiO3. Silicate powders were transform into adequate inks that were added to a Low Temperature Cofire Ceramic (LTCC) substrates with thick film technology using screen printing which continues to offer innovative and cost effective solutions to the increasing demands for higher circuit densities. These silicate sensors are low power-high temperature heated ceramic sensors to detect halogen gases. Every sensor responded to the gas showing stability and reproducibility. Phase diagrams for these silicates were used to produce different combinations. The use of the eutectoid point in the phase diagrams was critical to reduce the working temperature. Testing and characterization of pure silicates as well as their combinations are presented. The impact of various parameters (e.g. mechanical design, materials design, structure, properties, performance and processing) for the sensors including their relationships for electronic packaging was reviewed and it was found critical to determine the microelectronics packaging reliability and integrity. The fundamentals of the sensor behavior including the deformation and failure mechanisms were also determined.
Mary C. Ruales, Associate Professor
Universidad del Turabo
Gurabo, PR

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