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Electromagnetic valve made in LTCC
Keywords: microfluidics, valve, LTCC
Today`s miniaturization trend pushes ahead contemporary science. One of the new fields of interest is microfluidics. It is a domain which interconnects various branches like chemistry, biology or microtechnology. Microfluidics has place among the fastest developed domains of science. It can be said the goal of this technology is to manufacture microsystem which will be able to completely substitute a conventional laboratory with qualified staff, sophisticated equipment, large amount of analytical reagents and long waiting time for results. The most popular names of such device are Lab-on-Chip (LoC) and Micro-Total-Analysis-System (µTAS). Microfluidic device consists of many components like channels, mixers, pumps, valves and others. Valve is one of the most important parts of LoC. It is utilized to control fluid flow in a microfluidic system. This paper describes technology of the electromagnetic valve made in the LTCC (Low Temperature Co-fired Ceramics). The actuation is supplied by mutual reaction between a 3D coil and a neodymium magnet bonded to flexible membrane. Such solution has many advantages like short reaction time, small power consumption and relatively great attractive forces. The valve is built in a hybrid PDMS-LTCC technology. The microfluidics and coil parts are fabricated in the LTCC technology. The flexible section is manufactured using a PDMS (poly(dimethylsiloxane)) membrane bonded to the ceramic part by plasma oxidation. The magnet is fixed on the membrane surface. The LTCC material was chosen for the sake of chemical durability and possibility of 3D structures creating. The PDMS membrane provides simultaneously very good stability and high flexibility.
Mateusz Czok,
Wrocław University of Technology
Wrocław, Not Applicable

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