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Effect of platinum metallization in cofired platinum /alumina microsystems for implantable medical applications
Keywords: Platinum, HTCC, Hermeticity
Typically, hermetic feedthroughs for implantable devices, such as pacemakers, use an alumina ceramic insulator brazed to a platinum wire pin. This material combination has a long history in implantable devices and is the desired structure due to the acceptance by the FDA for implantable hermetic feedthroughs. The growing demand for increased input/output (I/O) hermetic feedthroughs for implantable neural stimulator applications can be addresses by developing a new, co-fired platinum/alumina multilayer ceramic technology in a configuration that supports 300 plus I/Os, which is not commercially available. Different densification rate of platinum and alumina is the major issue in developing high-density feedthrough. This difference in densification rate could create delamination and crack in feedthrough structure and decrease the reliability and degree of the hermeticty of the final assembly. In this paper different metallization were used to minimize this difference. In addition to that the firing atmosphere and the firing profiles were evaluated to minimize this difference. X-ray diffraction, FIB nano-machining and SEM with EDS were used for the analysis of these conditions.
Ali Karbasi, Post-doctoral Researcher
Florida Internationl University
Miami, Florida

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