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Aerosol jet printing of two component thick film resistors on LTCC
Keywords: aerosol print, thick film resistor, glass
Aerosol jet printing is a rather new technology for the deposition of thick film structures offering high line and space resolution. The potential for miniaturization of thick film structures by use of Aerosol jet printing is very high. While the advantages of this technology could be shown by use of inks carrying single solid powder (e.g. silver, platinum, ceramic or glass powder), it is challenging to print solid powder mixtures because the differences in the aerodynamic properties of different ceramic powders. Due to those differences some changes in the mixing ratio within the aerosol jet occur and therefore poor reproducibility in the final film properties are obtained. In this work, thick film resistors consisting of RuO2 with particle size < 1 µm as the conducting phase and different glass powders with particle size around 1 µm as the isolating phase were investigated. Some of the glasses had a density very close to that of RuO2, other glasses significant below. Inks were produced by use of a solvent and organic additives. The inks were then printed on LTCC and the microstructures of the dried and the fired films were visualized by FIB preparation and SEM. The resistances as well as the temperature coefficients of the resistors were measured and compared to resistor films manufactured by identical solid composition but conventional screen print. The results of the resistors obtained will be presented and discussed in terms of powder properties, ink dispersion and printing parameters.
Markus Eberstein, Group Manager
Fraunhofer IKTS
Dresden, Saxony

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