Here is the abstract you requested from the HiTEN_2013 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|Silicon Capacitors with extremely high stability and reliability ideal for high temperature applications|
|Keywords: 250°C, Miniaturization, High Reliability|
|Abstract Silicon capacitors are highly recommended for geothermal, oil well logging, automotive and military/Aerospace applications. They can function in a wide operating temperature range and withstand temperatures up to 250°C, with extremely high insulation resistance and very good stability . These capacitors feature high miniaturization with a large capacitance to volume ratio. Available in hundreds or thousands of nanofarads, in various sizes and custom configurations, these capacitors are usable at low frequencies but are also appropriate for RF applications. Recent progress in the 3D Silicon Capacitor IPDIA technology allows for even higher integration. This is a key driver for growth in high reliability applications.|
|Laurent Lengignon/Catherine Bunel,