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Non-contact microwave characterization of printed resistors
Keywords: Non-contact microwave microscopy, Printed resistors, High resolution characterization
In this work we demonstrate the use of a high resolution non-contact scanning microwave microscope for characterization of printed resistors. The resonant microwave probe presented in this work operates at a frequency of 5.73 GHz and it is based on a dielectric resonator coupled to a gold-coated tungsten tip with radius of 200um protruding from a cavity wall. Direct print additive manufacturing was used to produce the resistive films. Non-contact measurements of the resonant frequency Fr and quality factor Q of the resonant microwave probe at a standoff distance of 10um were performed. Quality factor images were obtained over a scan area of 450um by 350um in steps of 10um. Measurements reveal that Q varies from 214 to 227 over the studied region. In this work, variations in Q are associated to non-uniformities on the resistor’s surface. Quality factor of the probe was also acquired as a function of the tip-sample distance and measured data was fitted to a polynomial equation. We converted Q images to sheet resistance images based on the polynomial equation and the material resistivity (DuPont 7082). Using the proposed approach, we found that the average sheet resistance over the scan area is Rs = 1139 Ohm/sq and that Rs variations up to 550Ohm/sq, due to non-uniformities on the resistor’s thickness, were detected by the microwave microscope. The local microwave characterization ability demonstrated by the non-contact microscope presented in this work could be of interest for defects detection in printed microwave circuits.
María F. Córdoba-Erazo ,
University of South Florida
Tampa, Florida

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