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RF MEMS DPDT Switch Using Novel Simulated Seesaw Design
Keywords: RF , MEMS, Switch
The paper investigates an RF MEMS (Radio Frequency Micro Electro-Mechanical System) switch from DC to 5.8 GHz switching, for use in mobile communications systems and devices. The RF MEMS switch uses a novel seesaw design to create a Double-Pole Double-Throw Switch (DPDT) which increases the capabilities of the seesaw design structure. Low Switching supply voltage was achieved during its development and with high RF isolation. It was discovered that an improvement could be achieved by adding additional contacts after looking at other available seesaw designs. An improved concept over existing Single-Pole Single-Throw (SPST) Seesaw switch was achieved by using an improved DPDT switch with a set of upper and lower contacts to each side of the seesaw. To conform to the Microscale which is 1 µm - 100 µm, a length of 41µm was chosen to provide an adequate size for fabrication. Copper Bulk General (Cu) was chosen for the pivot material due to its good electrical conductivity and sufficient flexibility for elastic recovery. A working simulation was achieved without compromising the ‘Air-Gap’ between the contacts, which retains high isolation when the switch is open-circuited. The electrostatic supply voltage has been significantly reduced to values which are closer to those used for mobile devices.
Mohammed Al-Amin,
Anglia Ruskin Univeristy
Chelmsford , Essex
UK


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